grandiflorum/LithoSim
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End of preview. Expand
in Data Studio
The benchmark of "LithoSim: A Large, Holistic Lithography Simulation Benchmark for AI-Driven Semiconductor Manufacturing"
The corresponding GitHub repo can be found at https://dw-hongquan.github.io/LithoSim/
Data Construction
- 4 in-distributed dataset (OPC_Metal/Metal/OPC_Via/Via).
- 1 out-of-distribution (OOD) dataset.
- Each main dataset has a train_val and a test folder with compressed data file.
- Each set of data contains a source_simple.src description of the source, a layout.png, a mask.png, and a number of RI under different process variations.
- Downloads last month
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Models trained or fine-tuned on grandiflorum/LithoSim